SemiWiki· 2026-11-02 02:00(北京时间) ·重要度 36

High-NA’s Obituary Was Premature

High numerical aperture EUV lithography was supposed to be the next step in semiconductor manufacturing. Then came the doubts: expensive scanners, smaller exposure fields, difficult economics and big customers finding ways to stretch existing equipment. It became tempting to confuse a delayed adoption curve with a technology… Read More The post High-NA’s Obituary Was Premature appeared first on SemiWiki .

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